Prof. Dr. Michael HEUKEN

Rhenish-Westphalian Technical University, Aachen, Germany, EU


Position: Professor atRhenish-Westphalian Technical University Aachen (Germany, EU), Vice President corporate Research & Development at AIXTRON SE

Specialization: Semiconductor growth by Metalorganic Vapour Phase Epitaxy (MOVPE), device technology



At the NANOCON 2014 conference Prof. Michael Heuken will deliver the invited lecture at the thematic session A – Preparation
and Properties of Nanostructures.


Education and Career Accomplishments:
Prof. Dr. Michael Heukenwas born in Oberhausen, Germany on November 17th, 1961. He received the Diplom‑Ingenieur degree and the Rd. Ing. degree in Electrical Engineering from Duisburg University in 1985 and 1989, respectively. He joined the Institut für Halbleitertechnik at RWTH Aachen as senior engineer and has been working in the field of metalorganic vapor phase epitaxy for electronic and optoelectronic devices. In 1994 he finished his Habilitation in semiconductor technology and devices with a thesis on MOCVD technology for optoelectronic devices. Since then and still at present he has been lecturer for semiconductor technology and devices as well as circuits for communication systems at RWTH. In 1997 he joined AIXTRON AG in Aachen-Germany where he is now Vice President Corporate Research & Development. In 1999 he was honoured as Professor at the Rheinisch-Westfaelische Technische Hochschule Aachen (RWTH Aachen, Germany, EU).


Research interests:
His main research interests are in the fields of Semiconductor growth by MOVPE, materials characterization, device technology, electronic and optoelectronic devices and circuits.

Prof. Heuken is author and co-author of more than 600 publications in international journals and several invited papers at international conferences. He was President of DGKK (German Crystal Growth Association) from 2002 to 2005, is currently councillor of IOCG (International Organization of Crystal Growth) representing Germany, he was board member of EPIC (European Photonics Industry Consortium), board member of OptechNet e.V and member of VDE/ITG. He acts as referee for international Journals. He has been granted several patents in the field of CVD technology.